Leakage Current Reduction in Electrical Isolation Gate Structures

ABSTRACT

In an embodiment, an integrated circuit includes transistors in different active regions, electrically isolated using single diffusion break isolation. The single diffusion break isolation includes a first dummy transistor that has a different threshold voltage than the transistors in either active region for which the single diffusion break is creating isolation. The first dummy transistor may have lower leakage current than transistors in either active region, creating effective isolation between the active regions and consuming relatively small amounts of power due to the lower leakage currents.

This application is a continuation of U.S. patent application Ser. No.16/156,461, filed Oct. 10, 2018 and now U.S. Pat. No. 10,700,065, whichis hereby incorporated by reference in its entirety.

BACKGROUND Technical Field

Embodiments described herein are related to reduction of leakage currentin dummy isolation gates between active regions that form transistorshaving different threshold voltages.

Description of the Related Art

As semiconductor fabrication technologies continue to evolve, reducingthe feature sizes of the elements that can be fabricated on anintegrated circuit, the size of a given integrated circuit incorporatinga given number of transistors continues to decrease. The cost of a givenintegrated circuit is generally correlated to its size: largerintegrated circuits are typically more costly than smaller integratedcircuits.

At a given semiconductor fabrication technology node, the size of agiven integrated circuit is affected by its gate density: the number ofgates that can be included in a given integrated circuit area. Gatedensity is adversely impacted by the amount of diffusion break isolationrequired between active regions in the integrated circuit. A givendiffusion region can be divided into multiple active regions in whichtransistors are formed. Different active regions can have differentproperties, e.g. different active regions can have different transistortypes (e.g. transistors with different threshold voltages). Isolationbetween such active regions is required. Typically, in currentsemiconductor technologies, double diffusion break or even triplediffusion break isolation is used, although double diffusion break ismost common. As the number of diffusion breaks used for isolationincreases, the size of the isolation region increases, decreasing thegate density because the isolation regions are not being used to formactual gates that implement functionality in the integrated circuit.

Single diffusion break isolation consumes less area than doublediffusion break or triple diffusion break isolation, but has not beenused because of the numerous technical challenges involved that reducethe isolation effectiveness of the single diffusion break isolation andthe process complexity involved in creating physical isolation in suchsmall spacing with acceptable device variability. Another concern ismanaging the effects of point touch violations in mask creation iscomplex, and causes impacts in the single diffusion break isolation thatinduces larger leakage currents in the isolation region. The largerleakage currents increase total power consumption.

SUMMARY

In an embodiment, an integrated circuit includes transistors indifferent active regions, electrically isolated using single diffusionbreak isolation. The single diffusion break isolation includes a firstdummy transistor that has a different threshold voltage than thetransistors in either active region for which the single diffusion breakis creating isolation. The first dummy transistor may have lower leakagecurrent than transistors in either active region, creating effectiveisolation between the active regions and consuming relatively smallamounts of power due to the lower leakage currents.

BRIEF DESCRIPTION OF THE DRAWINGS

The following detailed description makes reference to the accompanyingdrawings, which are now briefly described.

FIG. 1 is a block diagram of one embodiment of a set of transistorsincluding transistors having different threshold voltages, separated bya single diffusion break isolation formed from a single dummy gate.

FIG. 2 is a block diagram of one embodiment of the set of transistorsshown in FIG. 1 in a FinFET process.

FIG. 3 is a block diagram illustrating shape rounding and exacerbationof shape rounding due to a touch point, for an embodiment.

FIG. 4 is a block diagram illustrating shapes drawn for variousthreshold voltage (VT) groups, in an embodiment, including examples oftouch points.

FIG. 5 is a block diagram illustrating adjusted shapes for various VTgroups, in an embodiment.

While embodiments described in this disclosure may be susceptible tovarious modifications and alternative forms, specific embodimentsthereof are shown by way of example in the drawings and will herein bedescribed in detail. It should be understood, however, that the drawingsand detailed description thereto are not intended to limit theembodiments to the particular form disclosed, but on the contrary, theintention is to cover all modifications, equivalents and alternativesfalling within the spirit and scope of the appended claims. The headingsused herein are for organizational purposes only and are not meant to beused to limit the scope of the description. As used throughout thisapplication, the word “may” is used in a permissive sense (i.e., meaninghaving the potential to), rather than the mandatory sense (i.e., meaningmust). Similarly, the words “include”, “including”, and “includes” mean“including, but not limited to.” As used herein, the terms “first,”“second,” etc. are used as labels for nouns that they precede, and donot imply any type of ordering (e.g., spatial, temporal, logical, etc.)unless specifically stated.

Within this disclosure, different entities (which may variously bereferred to as “units,” “circuits,” other components, etc.) may bedescribed or claimed as “configured” to perform one or more tasks oroperations. This formulation—[entity] configured to [perform one or moretasks]—is used herein to refer to structure (i.e., something physical,such as an electronic circuit). More specifically, this formulation isused to indicate that this structure is arranged to perform the one ormore tasks during operation. A structure can be said to be “configuredto” perform some task even if the structure is not currently beingoperated. A “clock circuit configured to generate an output clocksignal” is intended to cover, for example, a circuit that performs thisfunction during operation, even if the circuit in question is notcurrently being used (e.g., power is not connected to it). Thus, anentity described or recited as “configured to” perform some task refersto something physical, such as a device, circuit, memory storing programinstructions executable to implement the task, etc. This phrase is notused herein to refer to something intangible. In general, the circuitrythat forms the structure corresponding to “configured to” may includehardware circuits. The hardware circuits may include any combination ofcombinatorial logic circuitry, clocked storage devices such as flops,registers, latches, etc., finite state machines, memory such as staticrandom access memory or embedded dynamic random access memory, customdesigned circuitry, analog circuitry, programmable logic arrays, etc.Similarly, various units/circuits/components may be described asperforming a task or tasks, for convenience in the description. Suchdescriptions should be interpreted as including the phrase “configuredto.”

The term “configured to” is not intended to mean “configurable to.” Anunprogrammed FPGA, for example, would not be considered to be“configured to” perform some specific function, although it may be“configurable to” perform that function. After appropriate programming,the FPGA may then be configured to perform that function.

Reciting in the appended claims a unit/circuit/component or otherstructure that is configured to perform one or more tasks is expresslyintended not to invoke 35 U.S.C. § 112(f) interpretation for that claimelement. Accordingly, none of the claims in this application as filedare intended to be interpreted as having means-plus-function elements.Should Applicant wish to invoke Section 112(f) during prosecution, itwill recite claim elements using the “means for” [performing a function]construct.

In an embodiment, hardware circuits in accordance with this disclosuremay be implemented by coding the description of the circuit in ahardware description language (HDL) such as Verilog or VHDL. The HDLdescription may be synthesized against a library of cells designed for agiven integrated circuit fabrication technology, and may be modified fortiming, power, and other reasons to result in a final design databasethat may be transmitted to a foundry to generate masks and ultimatelyproduce the integrated circuit. Some hardware circuits or portionsthereof may also be custom-designed in a schematic editor and capturedinto the integrated circuit design along with synthesized circuitry. Theintegrated circuits may include transistors and may further includeother circuit elements (e.g. passive elements such as capacitors,resistors, inductors, etc.) and interconnect between the transistors andcircuit elements. Some embodiments may implement multiple integratedcircuits coupled together to implement the hardware circuits, and/ordiscrete elements may be used in some embodiments. Alternatively, theHDL design may be synthesized to a programmable logic array such as afield programmable gate array (FPGA) and may be implemented in the FPGA.

As used herein, the term “based on” or “dependent on” is used todescribe one or more factors that affect a determination. This term doesnot foreclose the possibility that additional factors may affect thedetermination. That is, a determination may be solely based on specifiedfactors or based on the specified factors as well as other, unspecifiedfactors. Consider the phrase “determine A based on B.” This phrasespecifies that B is a factor is used to determine A or that affects thedetermination of A. This phrase does not foreclose that thedetermination of A may also be based on some other factor, such as C.This phrase is also intended to cover an embodiment in which A isdetermined based solely on B. As used herein, the phrase “based on” issynonymous with the phrase “based at least in part on.”

This specification includes references to various embodiments, toindicate that the present disclosure is not intended to refer to oneparticular implementation, but rather a range of embodiments that fallwithin the spirit of the present disclosure, including the appendedclaims. Particular features, structures, or characteristics may becombined in any suitable manner consistent with this disclosure.

DETAILED DESCRIPTION OF EMBODIMENTS

FIG. 1 is a top view of one embodiment of a portion of a semiconductorsubstrate with transistors formed on the substrate. In variousembodiments, the substrate may have a first conductivity type (e.g.P-type (P) or N-type (N)). The conductivity type may be dependent on theimpurities that are included in the substrate (e.g. through diffusion orother impurity-insertion mechanisms). That is, P diffusions usedifferent impurities than N diffusions. The impurities are also oftenreferred to as dopants. The initial conductivity type may be based onthe impurities included in the wafer prior to the start of thesemiconductor fabrication process. Generally, the conductivity type mayindicate the voltage needed between the gate and source of a transistorfor active current conduction to occur (for the transistor to be “on”).P transistors conduct with a negative gate to source voltage, whereas Ntransistors conduct with a positive gate to source voltage. When thevoltage is not present, the transistor is said to be not activelyconducting or “off”. However, in the off state, leakage currents dooccur. The leakage currents are lower in magnitude than the conductioncurrents, but can be a significant source of power consumption in anintegrated circuit.

In an exemplary embodiment, a P semiconductor substrate may be used. Inthe semiconductor fabrication process, an N-well may be formed in the Psubstrate. Other embodiments may have an N substrate and may use aP-well, or a dual-well semiconductor fabrication process may be used.The N-well is not shown in FIG. 1 for simplicity. Semiconductordiffusion regions 12 may be formed within the N-well. The diffusionregions 12 may be insulated from each other using any fabricationtechnique (e.g. shallow trench isolation (STI)).

The diffusion regions 12 may be doped with impurities to produce highlydoped N-type and P-type conduction regions (denoted as N+ and P+). Inthe illustrated embodiment, cross-hatched area 18 may represent a P+region and double cross-hatched area 20 may represent an N+ region. Theareas 18 and 20 may be the areas over which the dopants may be diffused.Transistors may be formed in the diffusion regions by constructing gatestructures over the diffusion regions, on the surface of the substrate(e.g. the gate 16 shown in FIG. 1).

A transistor may have a threshold voltage. The threshold voltage of atransistor may be the gate to source voltage magnitude (positive ornegative, based on conductivity type) at which a channel is fully formedin the transistor from the gate to the source, so that a saturationlevel of active current flow is possible. Once the threshold voltage isexceeded, the transistor is considered “on.” When the gate to sourcevoltage is between zero and the threshold voltage, the current flowvaries significantly with the magnitude of the voltage. Generally, asemiconductor fabrication process may support several transistor types,where different types have different threshold voltages. Transistorshaving low threshold voltages are generally faster to turn on, andsupport high performance. However, transistors having low thresholdvoltages may also be subject to higher leakage currents and thuscontribute to higher power consumption.

Transistors may be designed to have different threshold voltages. Thethreshold voltage of the transistor may be the nominal voltage for thattransistor. That is, a given instance of a transistor having a giventhreshold voltage may have variance in the actual threshold voltage thatcauses conduction (e.g. due to variations that occur in thesemiconductor fabrication process across the integrated circuit). Otherfactors such as temperature, aging effects, etc. may affect the actualthreshold voltage as well. However, the threshold voltage may beapproximately the nominal voltage. A transistor (or transistor type) maybe referred to as “having” a particular threshold voltage. Thisterminology refers to the nominal threshold voltage that the transistoris designed for, even though there may be some variation.

In one embodiment, the threshold voltage of a transistor may beprimarily controlled based on the materials used in the gate structurethat forms the transistor in a given diffusion region. The gatestructure may be formed, for example, in multiple semiconductormanufacturing process steps in which layers of various materials may beapplied to produce a gate “stack” on the surface of the semiconductorsubstrate. The materials included in the gate stack for a giventransistor type, and/or the order of those materials, may control thethreshold voltage of the transistor. Viewed in another way, thethreshold voltage may be dependent on the materials that are used toform the gate structure. Viewed in still another way, the materials usedin the gate structure may be a factor in determining the thresholdvoltage of the transistor, and more particularly may be a primary factoror dominant factor.

Because the lowest threshold voltage transistors are also oftenassociated with higher leakage currents, integrated circuit designersmay implement designs using multiple transistor types. Low thresholdvoltage transistors may be used in performance-critical areas to achievethe highest speeds, and higher threshold voltage transistors may be usedwhere a slower performing transistor still meets design requirements.Additionally, varying transistor types may be selected based on designrobustness considerations, etc.

When transistors having different threshold voltages are formed innearby areas (e.g. adjacent standard cells), the transistors may beformed in the same diffusion region. Transistors having a giventhreshold voltage can be grouped in an “active region” of the diffusionregion. Transistors in the same active region may be formed with minimumspacing according to the semiconductor fabrication process and thus mayachieve high density. That is, there may not be an additional isolationneeded between transistors other than following the minimum spacingrules. On the other hand, when active regions of different transistortypes abut each other within a diffusion region, a diffusion breakisolation may be inserted between them. Thus, a pair of active regionsmay logically abut each other if there are no other active regionsbetween the two regions, even though a diffusion break isolation mayhave been inserted.

For example, a first active region in each diffusion region 12 in FIG. 1may be defined to the left of the dotted line 10 in FIG. 1. Transistorsin this active region have a threshold voltage VTA. Various gates suchas the gate 16 may be constructed in the active region to form thetransistors in the active region. Another active region in eachdiffusion region 12 may defined to the right of the dotted line 14 inFIG. 1. Transistors in this active region may have a threshold voltageVTC. VTC is different from VTA (e.g. VTC may be higher or lower thanVTA). The area between the active regions between the dotted lines 10and 14) is the diffusion break isolation.

A diffusion break isolation includes one or more transistors having a“dummy” gate structure. The dummy gate may be coupled to a fixed voltagesource, such as a power supply voltage, so that the transistor formed bythe dummy gate is ensured to be off during operation. Accordingly, adummy gate for an N region may be coupled to Vss (or “ground”), becauseN transistors need a positive gate to source voltage to turn on. A dummygate for a P region may be coupled to Vdd, since a negative gate tosource voltage is used to turn on P transistors. Since the dummytransistors in the diffusion break are off, they create electricalinsulation/isolation between the active regions. That is, current flowbetween the regions is substantially prevented/minimized by thediffusion break isolation.

In FIG. 1, a single diffusion break is used between the active regions,formed by dummy gate structures 22 and 24 for the N region and P region,respectively. That is, a single gate structure is used in the singlediffusion break, minimizing the space occupied by the diffusion breakand thus permitting higher usable gate density. The threshold voltage ofthe transistors in the single diffusion break is VTB, which is differentfrom VTA and VTC. Particularly, VTB may be greater than both VTA andVTC. While the transistors are inactive during operation (providingelectrical isolation between the active regions), having a higherthreshold voltage also reduces the leakage current. The lower leakagecurrent lessens the power consumption in the single diffusion break,which may improve power efficiency. Thus, the leakage current in each ofthe transistors formed by the dummy gates 22 and 24 is lower than theleakage current in a given transistor in the active regions (e.g. lowerthan a given transistor in the active regions to the left of the dottedline 10, having the threshold voltage VTA, and lower than a giventransistor in the active region to the right of the dotted line 14,having the threshold voltage VTC).

It is noted that, while the gates in the active regions (e.g. gate 16)are shown as covering both the P and N portions of the active regions,the gates may be divided to form independent P and N transistors,similar to the gates 22 and 24 in the diffusion break isolationstructure.

FIG. 1 illustrates generically any type of semiconductor substrate. Inan embodiment, the single diffusion breaks with higher threshold voltagetransistors than the active regions they isolate may be employed in afin field effect transistor (FinFET) process. FIG. 2 is a block diagramillustrating the embodiment of FIG. 1 with the fins of a FinFETprocessor. In FIG. 2, the diffusion regions 12 may include multiple“fins” 26. The fins 26 in the semiconductor regions 12 may rise abovethe surface of the substrate. The fins 26 in each region 12 may beparallel to each other and parallel to the fins 26 in other regions 12.The fins 26 may actually be separated by insulators such as STI, and sothe actual N+ and P+ regions may be in the fins 14 themselves. Dependingon the FinFET fabrication process, the fins may be further grown intoother shapes such as diamond or merged together through a semiconductorepitaxial process step.

When using the single diffusion break isolation as described above,various shapes used to form masks for the semiconductor fabricationprocess may experience point touch violations. For example, variousmasks may be used to pattern the surface of the semiconductor substrateto build the gate structure stacks mentioned above. The masks may, forexample, expose the active regions that are to receive a given layer ofmaterial forming the gate stack and to prevent the exposure of activeregions that are not to receive the material. The masks may be used forphotolithography to selectively harden a photo resist in areas that arenot to be exposed, prior to the application of the material. Theunhardened photo resist may be removed, and the material may be applied.The hardened photo resist may then be removed (along with any of thematerial atop the hardened photo resist) after the material is applied.In this manner, the material is selectively included in gate stacks asdesired.

The mask shapes to either side of the single diffusion breaks canexperience point touch violations as they touch at a corner of theshapes. FIG. 3 is a block diagram illustrating the point touchviolation. In general, mask shapes drawn by various electronic designautomation (EDA) tools become slightly rounded. On the left in FIG. 3, arectangular shape 30 is shown (dotted lines) along with the resultingslightly rounded shape within the rectangle (solid line). On the rightin FIG. 3, two rectangular shapes 32 and 34 that touch at a corner 36are shown. To meet various minimum spacing requirements in thesemiconductor fabrication process, the resulting shapes are even morerounded.

FIG. 4 is a block diagram illustrating point touch violations in masksfor various processing steps in the formation of gate structures for theintegrated circuit, for an embodiment. The example of FIG. 4 may applyto the embodiment of the semiconductor substrate shown in FIGS. 1 and 2,for example, with active regions having threshold voltages VTA and VTCand the single diffusion break transistors having threshold voltage VTB.

In this embodiment, various VT groups may be defined based on whichmaterials are included in each gate stack. For example, at each stepanother material that may be selectively included in a gate stack to setthe threshold of the transistors may be applied. If a transistor of agiven conduction type and desired threshold voltage includes thatmaterial (or includes that material at that point in the gate stack, ifthe same material is applied more than once), then an active regionincluding those transistors participates in the application of thatmaterial. If the transistor does not include the material, it is maskedfrom the application of that material. Thus, transistors of differentthreshold voltages may be part of a VT group if those transistors bothreceive the material to be deposited at the step corresponding to thatVT group, and are not part of the VT group if they do not receive thematerial to be deposited.

Four VT groups are illustrated in FIG. 4. In the first VT group 40, theN-type transistors having threshold voltage VTA and the P-typetransistors having the threshold voltage VTC require mask shapes (e.g.they do not receive the material being deposited at the step representedby the first VT group 40). The mask shapes are shown in FIG. 4 asreference numerals 42 and 44, respectively. These two shapes have apoint touch and thus become rounded as shown in FIG. 3. The roundedportions in particular affect the area that includes the dummy gatestructures, shown as a heavy-lined rectangle 46. Similarly, in a secondVT group 50, the N-type transistors having threshold voltage VTC and theP-type transistors having threshold voltage VTA require mask shapes(reference numerals 46 and 50 respectively) and experience a point touchviolation. In a third VT group 52, no mask shapes are needed, and in afourth VT group 54 the N-type transistors of threshold voltage VTA andthe P-type transistors of the threshold voltage VTC (reference numerals56 and 58, respectively) and they experience a point touch violation.

Because the area 46 where the point touch violations occur correspondsto the dummy gate structure in the single diffusion break isolation, forwhich a high threshold voltage is desired, the point touch violationsmay be resolved by moving the shapes away from each other, exposing thearea 46 to each VT group. Alternatively, if the dummy gate structure isnot to receive the material applied in a given VT group, the point touchviolation may be resolved by moving the shapes toward each other,creating an area of overlap (when viewed vertically in FIGS. 4 and 5)and covering the dummy gate structure. The materials included in thedummy gate may be a superset of the materials included in the gatestructures of the VTA and VTC transistors, in an embodiment. Viewed inanother way, the materials in the gate structures in the VTA transistorsmay be a subset of the materials in the gate structure of the dummy gatetransistors. Similarly, the materials in the gate structures of the VTCtransistors may be a subset of the materials forming the gate structureof the dummy gate transistors.

FIG. 5 illustrates the VT groups 40, 50, 52, and 54 with the shapesadjusted. In the VT groups 40 and 54, the shapes have been adjusted bymoving them away from the area 46. In the VT group 50, the shapes havebeen adjusted by moving them toward (and overlapping) the area 46. Thepoint touch violations are resolved, and thus more regular shapes appear(reference numerals 60, 62, 64, 66, 68 and 70 corresponding to referencenumerals 42, 44, 46, 48, 56, and 58, respectively). Additionally, thearea 46 is included or excluded appropriately in each VT group 40, 50,52, and 54 to create the desired threshold voltage VTB.

While 4 VT groups are illustrated in FIGS. 4 and 5, generally any numberof VT groups may be used in various embodiments. The number of VT groupsmay vary based on the number of layers of materials that may be includedin a gate stack, the number of supported variations in the materials fora gate stack to create transistors of the various threshold voltages,etc.

Numerous variations and modifications will become apparent to thoseskilled in the art once the above disclosure is fully appreciated. It isintended that the following claims be interpreted to embrace all suchvariations and modifications.

What is claimed is:
 1. An integrated circuit comprising: a first activeregion within a first diffusion region of a first conductivity type,wherein the first active region includes a plurality of firsttransistors having a first threshold voltage, wherein a first transistorof the plurality of first transistors has a first gate formed from afirst plurality of layers of materials, and wherein the first thresholdvoltage is dependent on the materials in the first plurality of layersof materials and the order of the first plurality of layers; a secondactive region within the first diffusion region, wherein the secondactive region include a plurality of second transistors having a secondthreshold voltage different than the first threshold voltage, wherein asecond transistor of the plurality of second transistors has a secondgate formed from a second plurality of layers of materials, wherein thesecond threshold voltage is dependent on the materials in the secondplurality of layers of materials and the order of the second pluralityof layers; and a single diffusion break isolation between the firstactive region and the second active region, wherein the single diffusionbreak isolation includes a single transistor having a third thresholdvoltage greater than the first threshold voltage and the secondthreshold voltage, wherein the single transistor has a single gateformed from a third plurality of layers of materials, wherein the thirdthreshold voltage is dependent on the third plurality of layers ofmaterials and the order of the third plurality of layers, wherein thereis at least one difference between the first plurality of layers ofmaterials and the second plurality of layers of materials, wherein thereis at least one difference between the first plurality of layers ofmaterials and the third plurality of layers of materials, and whereinthere is at least one difference between the third plurality of layersof materials and the second plurality of layers of materials.
 2. Theintegrated circuit as recited in claim 1 wherein a leakage current inthe single transistor is less than a leakage current in the firsttransistor, and wherein the leakage current in the single transistor isless than a leakage current in the second transistor.
 3. The integratedcircuit as recited in claim 1 wherein the single gate is coupled to afixed voltage input during operation that ensures that the singletransistor is off during operation.
 4. The integrated circuit as recitedin claim 3 further comprising: a third active region within a seconddiffusion region, wherein the second diffusion region has a secondconductivity type different from the first conductivity type, whereinthe third active region includes a plurality of third transistors havinga fourth threshold voltage, wherein a third transistor of the pluralityof third transistors has a third gate formed from a fourth plurality oflayers of materials, and wherein the fourth threshold voltage isdependent on the materials in the fourth plurality of layers ofmaterials and the order of the fourth plurality of layers; a fourthactive region within the second diffusion region, wherein the fourthactive region includes a plurality of fourth transistors having a fifththreshold voltage different than the fourth threshold voltage, wherein afourth transistor of the plurality of fourth transistors has a fourthgate formed from a fifth plurality of layers of materials, wherein thefifth threshold voltage is dependent on the materials in the fifthplurality of layers of materials and the order of the fifth plurality oflayers; and a second single diffusion break isolation between the thirdactive region and the fourth active region within the second diffusionregion, wherein the second single diffusion break isolation includes asecond single transistor having a second single gate formed from a sixthplurality of layers of materials and aligned to the single gate of thesingle transistor, wherein the second single transistor has a sixththreshold voltage greater than the fourth threshold voltage and thefifth threshold voltage, wherein the sixth threshold voltage isdependent on the materials in the sixth plurality of layers of materialsand the order of the sixth plurality of layers, and wherein there is atleast one difference between the fourth plurality of layers of materialsand the fifth plurality of layers of materials, wherein there is atleast one difference between the fourth plurality of layers of materialsand the sixth plurality of layers of materials, and wherein there is atleast one difference between the fifth plurality of layers of materialsand the sixth plurality of layers of materials.
 5. The integratedcircuit as recited in claim 4 wherein the second single gate is coupledto a second fixed voltage input during operation that ensures that thesecond single transistor is off during operation, wherein the secondfixed voltage input is different than the fixed voltage input.
 6. Theintegrated circuit as recited in claim 1 wherein the plurality of firsttransistors, the plurality of second transistors, and the singletransistor are fin field effect transistors (FinFETs).
 7. An integratedcircuit comprising: a first diffusion region of a first conductivitytype, wherein the first diffusion region comprises: a plurality of firsttransistors having a first threshold voltage, wherein a first pluralityof layers of materials forming gates of the plurality of firsttransistors are a factor in the first threshold voltage; a plurality ofsecond transistors having a second threshold voltage different than thefirst threshold voltage, wherein a second plurality of layers ofmaterials forming gates of the plurality of second transistors are afactor in the second threshold voltage; and a single diffusion breakisolation between the first plurality of transistors and the secondplurality of transistors, wherein the single diffusion break isolationincludes a single transistor having a single gate, wherein the singletransistor has a third threshold voltage that is greater than the firstthreshold voltage and the second threshold voltage, and wherein a thirdplurality of layers of materials forming the single gate are a factor inthe third threshold voltage, and wherein there is at least onedifference between the third plurality of layers of materials and thefirst plurality of layers of materials, and wherein there is at leastone difference between the third plurality of layers of materials andthe second plurality of layers of materials.
 8. The integrated circuitas recited in claim 7 wherein there is at least one difference betweenthe first plurality of layers of materials and the second plurality oflayers of materials.
 9. The integrated circuit as recited in claim 7wherein the difference is at least one of an order of the thirdplurality of layers of materials and a type of material in a given layerof the third plurality of layers of materials.
 10. The integratedcircuit are cited in claim 7 wherein the first plurality of layers ofmaterials are a dominant factor in the first threshold voltage.
 11. Theintegrated circuit as recited in claim 7 wherein the first plurality oflayers of materials are a primary factor in the first threshold voltage.12. The integrated circuit as recited in claim 7 further comprising: asecond diffusion region of a second conductivity type different than thefirst conductivity type, wherein the second diffusion region comprises:a plurality of third transistors having a fourth threshold voltage,wherein a fourth plurality of layers of materials forming gates of theplurality of third transistors are a factor in the fourth thresholdvoltage; a plurality of fourth transistors having a fifth thresholdvoltage different than the fourth threshold voltage, wherein a fifthplurality of layers of materials forming gates of the plurality offourth transistors are a factor in the fifth threshold voltage; and asecond single diffusion break isolation between the third plurality oftransistors and the fourth plurality of transistors, wherein the secondsingle diffusion break isolation includes a second single transistorhaving a second single gate, wherein the second single transistor has asixth threshold voltage that is greater than the fourth thresholdvoltage and the fifth threshold voltage, and wherein a sixth pluralityof layers of materials forming the second single gate are a factor inthe sixth threshold voltage, and wherein there is at least onedifference between the sixth plurality of layers of materials and thefourth plurality of layers of materials, and wherein there is at leastone difference between the sixth plurality of layers of materials andthe fifth plurality of layers of materials.
 13. The integrated circuitas recited in claim 12 wherein the second single gate is coupled to afixed voltage input during operation that ensures that the second singletransistor is off during operation.
 14. The integrated circuit asrecited in claim 13 wherein the single gate is coupled to a second fixedvoltage input during operation that ensures that the single transistoris off during operation.
 15. An integrated circuit comprising: a firstactive region within a first diffusion region of a first conductivitytype, wherein the first active region includes a plurality of firsttransistors having a first threshold voltage, wherein a first transistorof the plurality of first transistors has a first gate formed from afirst plurality of layers of materials, and the materials in the firstplurality of layers of materials and the order of the first plurality oflayers primarily control the first threshold voltage; a second activeregion within the first diffusion region, wherein the second activeregion including a plurality of second transistors having a secondthreshold voltage different than the first threshold voltage, wherein asecond transistor of the plurality of second transistors has a secondgate formed from a second plurality of layers of materials, wherein thematerials in the second plurality of layers of materials and the orderof the second plurality of layers primarily control the second thresholdvoltage; and a single diffusion break isolation between the first activeregion and the second active region, wherein the single diffusion breakisolation includes a single transistor having a third threshold voltagegreater than the first threshold voltage and the second thresholdvoltage, wherein the single transistor has a single gate formed from athird plurality of layers of materials, wherein the third plurality oflayers of materials and the order of the third plurality of layersprimarily control the third threshold voltage, wherein there is at leastone difference between the first plurality of layers of materials andthe second plurality of layers of materials, wherein there is at leastone difference between the first plurality of layers of materials andthe third plurality of layers of materials, and wherein there is atleast one difference between the third plurality of layers of materialsand the second plurality of layers of materials.
 16. The integratedcircuit as recited in claim 15 wherein a leakage current in the singletransistor is less than a leakage current in the first transistor, andwherein the leakage current in the single transistor is less than aleakage current in the second transistor.
 17. The integrated circuit asrecited in claim 15 wherein the single gate is coupled to a fixedvoltage input during operation that ensures that the single transistoris off during operation.
 18. The integrated circuit as recited in claim17 further comprising: a third active region within a second diffusionregion, wherein the second diffusion region has a second conductivitytype different from the first conductivity type, wherein the thirdactive region includes a plurality of third transistors having a fourththreshold voltage, wherein a third transistor of the plurality of thirdtransistors has a third gate formed from a fourth plurality of layers ofmaterials, and wherein the materials in the fourth plurality of layersof materials and the order of the fourth plurality of layers primarilycontrol the fourth threshold voltage; a fourth active region within thesecond diffusion region, wherein the fourth active region includes aplurality of fourth transistors having a fifth threshold voltagedifferent than the fourth threshold voltage, wherein a fourth transistorof the plurality of fourth transistors has a fourth gate formed from afifth plurality of layers of materials, wherein the materials in thefifth plurality of layers of materials and the order of the fifthplurality of layers primarily control the fifth threshold voltage; and asecond single diffusion break isolation between the third active regionand the fourth active region within the second diffusion region, whereinthe second single diffusion break isolation includes a second singletransistor having a second single gate formed from a sixth plurality oflayers of materials and aligned to the single gate of the singletransistor, wherein the second single transistor has a sixth thresholdvoltage greater than the fourth threshold voltage and the fifththreshold voltage, wherein the materials in the sixth plurality oflayers of materials and the order of the sixth plurality of layersprimarily control the sixth threshold voltage, wherein there is at leastone difference between the fourth plurality of layers of materials andthe fifth plurality of layers of materials, wherein there is at leastone difference between the fourth plurality of layers of materials andthe sixth plurality of layers of materials, and wherein there is atleast one difference between the fifth plurality of layers of materialsand the sixth plurality of layers of materials.
 19. The integratedcircuit as recited in claim 18 wherein the second single gate is coupledto a second fixed voltage input during operation that ensures that thesecond single transistor is off during operation.
 20. The integratedcircuit as recited in claim 15 wherein the plurality of firsttransistors, the plurality of second transistors, and the singletransistor are fin field effect transistors (FinFETs).